relation: http://miis.maths.ox.ac.uk/miis/73/
title: Lubrication Layer Perturbations in Chemical-Mechanical Polishing
creator: Bhattacharya, A.
creator: Breward, C.J.W.
creator: Gratton, M.
creator: Evans, J.
creator: Nicholas, M.
creator: Please, C.
creator: Schwendeman, D.
creator: Surles, M.
creator: Witelski, T.
subject: Energy and utilities
subject: Materials
subject: Information and communication technology
date: 2005
type: Study Group Report
type: NonPeerReviewed
format: application/pdf
language: en
identifier: http://miis.maths.ox.ac.uk/miis/73/1/Borucki-CMPLubricationLayer.pdf
format: application/pdf
language: en
identifier: http://miis.maths.ox.ac.uk/miis/73/2/Araca.pdf
identifier:   Bhattacharya, A. and Breward, C.J.W. and Gratton, M. and Evans, J. and Nicholas, M. and Please, C. and Schwendeman, D. and Surles, M. and Witelski, T.  (2005) Lubrication Layer Perturbations in Chemical-Mechanical Polishing.  [Study Group Report]